Mindman MFS Series: Flow Sensor(Lightweight Type) – MFS-R005-01-M5
$175.00
Flow Sensor(Lightweight Type), Rated Flow Range: -0.5~0.5L/min, Detection Direction: Two-Way, Operating Pressure Range: -100~200kPa, Output Type: 1 Analog Output(1~5V), Port Thread: M5 Female Thread
10000 in stock
Features
● Response time ¡Ü 5ms
● Compact and lightweight
● Small-object suction confirmation
● Air-leak detection
● For the semiconductor industry
| Item | Specification |
|---|---|
| Measured flow rate range | −10~10 L/min |
| Flow direction | Unidirection, Bidirectional |
| Rated pressure range | −100~200 kPa |
| Withstand pressure | 300 kPa |
| Fluid | Dry air, N2, non-corrosive / non-flammable gas |
| Power supply voltage | 15~24V DC ±10%, ripple (P-P) ≤10% |
| Current consumption | ≤20 mA |
| Accuracy — Repeatability | ≤±2% F.S. |
| Accuracy — Linearity | Non-linearity |
| Accuracy — Temp. characteristic (*1) | ≤±0.3% F.S./°C ~ ≤±0.6% F.S./°C |
| Accuracy — Pressure characteristic (*2) | ±5% F.S. ~ ±10% F.S. |
| Response time | ≤5 ms (90% response time) |
| Indicator | Green LED |
| Analog output | Voltage output range: 1~5V ±5% F.S. (±0.2V) (non-linearity); output impedance: 1 KΩ |
| Enclosure | IP40 |
| Working fluid temp. | 0~50°C (no condensation or freezing) |
| Ambient temp. range | Operation: 0~50°C; Storage: −10~60°C (no condensation or freezing) |
| Ambient humidity range | Operation: 0~50°C; Storage: −10~60°C (no condensation or freezing) |
| Withstand voltage | 1000V AC in 1-min (between case and lead wire) |
| Insulation resistance | ≥50 MΩ (500V DC, between case and lead wire) |
| Vibration | Total amplitude 1.5mm or 10G, 10 Hz - 55 Hz - 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z |
| Shock | 100 m/s² (10G), 3 times each in direction of X, Y and Z |
| Lead wire | Ø2.6 oil-resistance cable (PVC) - 26 AWG (0.15 mm²) - 3 cores |
| Weight | Product: approx. 4 g (w/o port); approx. 9.6 g (M5 port); lead wire (3M): 31.8 g |
| Remark | *1. Benchmark: 25°C (temperature range 0~50°C). *2. Benchmark: 150 kPa (pressure range −100~200 kPa). |
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